A REVIEW PAPER: Nano-Electro-Mechanical System(NEMS) Based Memory
Syifaul Fuada
Microelectronic, Institut Teknologi Bandung
Abstract
NEMS (Nano Electromechanical Systems) comes from needs of an integrated system able to characterize the electro-mechanical systems at nanoscale.This paper reviews and discusses recent progress in nano-electro-mechanical system (NEMS) based memory devices and their main figures of basic knowledge, advatages-disadvatages, opportunities and challenges.
Keywords: NEMS, Memory
Topic: Lain-lain (ETC)