Evaluating the Effect of ZnO Stucture on Electrical Properties using Capacitive Sensor
Amalia Sholehah1,2 , Rizki Ganiharto1,2 , Harisma Nugraha3, A. Ali Alhamidi2, Nofrijon Sofyan4, Akhmad Herman Yuwono4, Mahfudz Al Huda3, Brian Yuliarto5
1 Advanced Material and Tomography Laboratory, Universitas Sultan Ageng Tirtayasa, Jl. Jenderal Sudirman Km 3 Cilegon, Banten – Indonesia 42435
2 Department of Metallurgical Engineering, Faculty of Engineering, Universitas Sultan Ageng Tirtayasa, Jl. Jenderal Sudirman Km 3 Cilegon, Banten – Indonesia 42435
3 Center of Non-Destructive Testing and Process Imaging, CTech Laboratories, EdWar Technology, Jl. Sutera Kavling Spektra Blok 23 BC No 10 – 12, Tangerang Selatan, Banten – Indonesia 15325
4 Department of Metallurgical and Materials Engineering, Faculty of Engineering, Universitas Indonesia, Kampus Baru Universitas Indonesia, Depok, Jawa Barat – Indonesia 16424
5 Departement of Engineering Physics, Faculty of Industrial Technology, Institut Teknologi Bandung, Jl. Ganesha No. 10, Bandung, Jawa Barat – Indonesia 41032
Abstract
Capacitive sensor works based on capacitive methods and serves to detect changes in the composition of dielectric materials by determining the capacitance value and dielectric constant. This type of sensor has advantages in convenient manufacturing process, a simple working mechanism, as well as extensive applications in various fields. In this study, capacitive sensors were used to characterize the electrical properties of materials that have several structures. The dielectric material samples used are bulk ZnO with particle (spherical) structure, ZnO synthesized by chemical bath deposition method (CBD) which has a rod structure, and synthetic ZnO results through a vapor phase method with tetrapod structure. The sensors were made by a parallel plate method using two copper plates as capacitors. The sensors were designed in 2x2 cm and 2x4 cm size, with the distance between the electrodes being 1 and 2 mm. The results showed that capacitive sensors proved to be able to distinguish capacitance values and electrical permittivity of ZnO with different structures. From the experiment, it was known that ZnO with a rod structure synthesized through the CBD method gave the highest capacitance and electrical permittivity values compared to other ZnO samples.
Keywords: ZnO, capacitive sensor, capacitance, permitivity
Topic: Materials Science