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The limited of government budget for the small dams construction in Semarang Regency has led to the need for determining the construction priority. However, the large number of these constructions technical aspects causes the determination of construction priorities to be difficult. One of the best methods for multi-criteria decision making is the Technique for Order Performance by Similarity to Ideal Solution (TOPSIS). However, ranking and weighting the criteria that use in these constructions was difficult. It was due to human assessment factors that were less precise especially on linguistic variables criteria. Therefore, a fuzzy method was needed to numerating these criteria. There are eight alternatives of small dams and seven criteria of technical aspects analyzed in this study. The first was determining membership function and weighting each criteria. Then, the modified TOPSIS method was applied to rank the eight alternatives. The highest priority was determined by finding alternative that has the largest closeness coefficient (CCi). Its represent alternative with closest distance to fuzzy positive ideal solution and farthest distance to fuzzy negative ideal solution. Based on the results of the analysis, Mluweh Small Dams has the highest CCi value of 0,612. So, Mluweh small dams is the highest priority in the construction of small dams in Semarang Regency