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Fabrication of Fluorine Doped Tin Oxide by Indonesian Local SnCl4 Precursors With Spin Coating Method
E Yustanti (a,*), G Fahmi (a), L H Lalasari (b), T Arini (b), L Andriyah (b), A Subhan (c), F Firdiyono (b), A Trenggono (a)

(a) Department of Metallurgical Engineering, Faculty of Engineering, Sultan Ageng Tirtayasa University, Jl. Jenderal Sudirman KM.03 Cilegon-Banten 42435, Indonesia
(b) Research Center for Metallurgy and Material, Indonesian Institute of Sciences (LIPI), Kawasan Puspiptek Serpong, Tangerang Selatan 15314, Indonesia
(c) Research Center for Physics–Indonesian Institute of Sciences (LIPI), Puspiptek Serpong, Tangerang Selatan 15314, Indonesia


Abstract

Fluorine-doped tin oxide is a thin layer of transparent conductive oxide, which has a function as a semiconductor. Fabrication of fluorine tin oxide from this research was expected to replace indium-doped tin oxide. Indium-doped tin oxide function as a commercial transparent conductive oxide. The raw material of indium was limited, so the price is higher than fluorine. The material used are Indonesia local tin (IV) Chloride, ammonium fluoride, and methanol. Conductive liquids has made by the sol - gel method. Sol gel liquids doped with ammonium fluoride to make a high conductivity. The transmittance value at the 1, 2, 3, 4, and 5 minutes deposition time were respectively 69.7; 43.6; 14.4; 14.1 and 34.7%. In this research, spin coating method under 3000 RPM and annealing temperature at 300oC. The results of the experiment shows, increased deposition time, make the thickness of the layer increased while resistivity and transmittance decreased. The optimum parameter for glass conductivity fabrication were obtained at 4 minutes time deposition, substrate temperature at 300 oC has a resistivity of 125 k Ω, transmittance 14.1% and bandgap energy 2.48 eV.

Keywords: fluorine-doped tin oxide, stannic (IV) chloride, sol - gel, spin coating.

Topic: Materials Science

Link: https://ifory.id/abstract/8FMbVjRXnpUY

Conference: Broad Exposure on Science and Technology (BEST 2019)

Plain Format | Corresponding Author (ERLINA YUSTANTI)

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