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Today, the development of the electricity system has led to an increase in the reliability and quality in the distribution of electrical energy, especially the neglect of the substation. One of the main equipment in the substation is the Circuit Breaker (CB), the security system needs to be maintained periodically. Maintenance delays will reduce the value of reliability. Based on CB cubicle breakdown data outgoing 20 kilo Volt, it appears that the CB has the highest breakdown time technically in two years. Breakdowns that occur greatly affect the reliability of the CB equipment. In this study, the selection of CB distribution substations will be examined and their reliability analyzed using the Failure Mode and Effect Analysis (FMEA) method. The results obtained from the study are the CB is to determine the reliability value by calculating the normal log distribution. Then also determined the failure obtained through FMEA analysis and pareto diagrams based on the value of the Risk Priority Number is the interuptor tube, moving contact, gear box value, fixed contact, Closing / tripping coil, and 110/220 Volt AC / DC Motor.