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Performance of health workers is still the issue in efforts to improve health services, World Health Organization (WHO) suggested to improve the health workers performance to overcome this issues. One of the important effort is the improvement of work motivation. This study aims to see the relationship between intrinsic and extrinsic motivation on the performance of nurses at Sultan Agung Semarang Islamic Hospital. This research was conducted by taking samples from 234 respondents using questionnaire, and the data analyzed with factor analysis and structural equation modeling. The Result showed intrinsic motivation has a relationship with the performance of nurses at Sultan Agung Semarang Islamic Hospital, while extrinsic motivation doesnt. Responsibility, work itself and worship are the most influence factors. There is a varied relationship among sex, and group of ages on work motivation. Conclusion, the Improvement of performance program can be done by increasing intrinsic motivation including the motivation of worship. Variations in motivational approach must be done with attention to individual character difference.