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Silver (Ag) nano catalyst has been deposited on SiO2 glass substrate by thermal evaporation method. The layer thickness was about 2.42 nm. The Ag nano catalyst was then annealed at temperature of 4000C with variation of annealing time of 1, 2, 3 and 4 hours. SEM, EDS and FTIR spectroscopy were used to characterize the samples. From the Scanning Electron Microscope (SEM) images showed that diameter size of the nanoparticles were mostly 2.92, 1.69, 0.69 and 0.89 mm, respectively. Energy Dispersive X-Ray (EDX) Spectroscopy revealed that composition of Ag for each sample are 0.26, 0.14, 0.48 and 0.14% respectively. Based on the SEM and EDX results, the smallest diameter of particles and the most Ag composition was obtained after annealing for 3 hours. Fourier transform infrared (FTIR) spectroscopy indicate that the Ag nano catalyst were formed by Si-O-Ag bonds at 1379 cm-1.