SURFACE TEXTURING OF CARBON BASED THIN FILM BY MEANS OF A HIGH DENSITY PLASMA OXIDATION
Dionysius J. D. H. Santjojo, Sukma W. Fitriani, Masruroh, Setyawan P. Sakti
Department of Physics, Faculty of Mathematics and Natural Sciences and
Collaborative Research Center for Advanced System and Material Technology,
Brawijaya University Indonesia
Abstract
Keywords: oxygen plasma, RF-DC plasma, oxygen etching, diamond-like carbon, surface-texturing, high density plasma
Topic: Synthesis and Characterization Techniques
Link: https://ifory.id/abstract/PuHQz6XLr7Wj
Conference: The 7th International Conference on Advanced Materials Science and Technology (ICAMST 2019)
Plain Format | Corresponding Author (Dionysius Joseph Djoko Herry Santjojo)
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